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Auteur Titre Type [ Année
] Filtres: Mot-clé est aluminum nitride CVD polycryst epitaxial film [Clear All Filters]
Epitaxial and polycrystalline growth of AlN by high temperature CVD. Experimental results and simulation.,
, Surf. Coatings Technol., Volume 205, Number 5, p.1294–1301, (2010)